This will be the first time in SEMICON Taiwan's 14-year history in which a special pavilion will be set up, SEMI said, emphasizing its significance.

MEMS will reach a market value of over US$8 billion by 2012, SEMI said, citing data from iSuppli. Demand for MEMS will continue to increase due to the pervasiveness of such products as game consoles, mobile phones, and other wireless devices, it said.

SEMI further said MEMS equipment will reach a market size of US$650 million and materials US$600 million, citing data from Yole Development.

The MEMS Pavilion will be organized by SEMI as well as the Microsystems Technology Center of the Industrial Technology Research Institute (ITRI) and will be featured at SEMICON Taiwan, to be held from Sept. 30 to Oct. 2 at the Taipei World Trade Center Exhibition Hall 1.

"Various companies have asked us to set up a MEMS special pavilion at SEMICON Taiwan, and we've heard their voice," said Tsao Shih-lun, president of SEMI Taiwan. "We do hope the special pavilion, held in conjunction with ITRI, will provide insights into MEMS' future development."